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[Slice&View] Three-Dimensional SEM Observation Method

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[Slice&View] Three-Dimensional SEM Observation Method

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A0045.jpg 打ち合わせ.jpg セミナー.jpg

By repeatedly performing cross-sectioning processing with FIB and observation with SEM, and reconstructing the obtained images, three-dimensional structural information can be obtained.

Using a high-resolution SEM device equipped with FIB, we can obtain three-dimensional structural information by repeatedly performing cross-sectioning (Slice) with FIB and observing (View) with SEM, and then reconstructing the acquired images. Similarly, Slice & View is also possible for SIM (Scanning Ion Microscope) images. - It is possible to observe secondary electron (SE), backscattered electron (BSE) images, and scanning ion microscope (SIM) images.

Related Link - https://www.mst.or.jp/method/tabid/143/Default.asp…

basic information

By repeatedly performing cross-sectional processing with FIB and observing with SEM, continuous SEM observation results can be obtained. By integrating SEM data on software, it is possible to obtain a three-dimensional constructed image.

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Applications/Examples of results

- Three-dimensional shape evaluation of semiconductor devices - Investigation of voids and disconnections in metal wiring after reliability testing - Evaluation of pattern misalignment - Assessment of the embedment of interlayer films - Investigation of the generation process of foreign substances within multilayer structures - Evaluation of the contact area of contacts - Three-dimensional evaluation of thin film coverage - Shape evaluation of seams within W contacts - Observation of the shape of pits in optical disc recording layers - Roughness evaluation of laminated structure interfaces

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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