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[Analysis Case] SIMS Measurement of Specially Shaped Samples

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[Analysis Case] SIMS Measurement of Specially Shaped Samples

Analysis is possible even for special shapes through innovative fixing methods.

Typically, SIMS measurements are conducted using chips with a flat surface of a few millimeters in size, but analysis can also be performed on small chips or samples with special shapes, typically less than 1 mm in size, by applying a fixed pre-treatment. Some samples that require investigation of trace components may have shapes that are not suitable for analysis under normal conditions, such as tiny chips or wire-like samples (Figure 1). In such cases, analysis is performed after fixation (Figure 2). Additionally, analysis may be possible for cross-sections, side surfaces, or samples with special shapes by applying pre-treatment.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/39…

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For detailed data, please refer to the catalog.

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Applications/Examples of results

Analysis of lighting, power devices, LSI, memory, electronic components, manufacturing equipment, and parts.

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