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Distortion evaluation using SEM equipment

EBSD: Electron Backscatter Diffraction

Measurements can be performed in bulk state without the need for thinning processes like TEM (NBD: Nano Beam Diffraction). It has the high spatial resolution characteristic of SEM and relatively high strain sensitivity. Additionally, there is a possibility of detecting local lattice strain as tensor data.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/38…

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For detailed data, please refer to the catalog.

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Applications/Examples of results

Crystal structure evaluation, stress, and strain assessment.

Distortion Evaluation with SEM Equipment_B0098

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