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[Analysis Case] Evaluation of the Cleaning Effect of Organic Ingredients

You can measure the 300mm wafer as it is.

TOF-SIMS has the characteristics of simultaneously evaluating organic and inorganic materials, being capable of analyzing small areas with high sensitivity at the very surface, and allowing evaluation while still in the form of 300mm wafers, making it effective for residue investigations during cleaning processes. We will introduce an analysis case of the removal effect of organic contamination on Si surfaces. TOF-SIMS analysis was conducted on samples where amine-based organic materials were confirmed to be in extremely small quantities by XPS. Even in small areas, it is possible to measure components in such extremely small amounts.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/24…

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For detailed data, please refer to the catalog.

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Applications/Examples of results

Analysis of LSI, memory, and electronic components.

[Analysis Case] Evaluation of Cleaning Effect of Organic Ingredients_C0035

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