[Analysis Case] Structural Evaluation of Magnetic Head MTJ Section
High-resolution TEM observation using Cs-corrected TEM
By using a Cs-corrected TEM device that compensates for spherical aberration, it is possible to observe the cross-sectional structure of devices with high resolution. In this case, we present data from high-resolution (HR)-TEM observations of the MTJ: magnetic tunnel junction part, extracted from a commercially available hard disk. Thus, it is possible to clearly observe the structure even in multilayer structures of ultra-thin metal films.
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Applications/Examples of results
Analysis of electronic components and magnetic elements.