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[Analysis Case] Evaluation of the Surface Silanol Groups

c0377.jpg

[Analysis Case] Evaluation of the Surface Silanol Groups

c0377.jpg
c0377.jpg

Quantitative evaluation of silanol groups is possible with TOF-SIMS.

The presence of silanol groups (Si-OH) on the surfaces of glass and wafers affects properties such as hydrophobicity and hydrophilicity. Therefore, it is likely to influence subsequent surface treatments, necessitating control. We will introduce a case where the quantification of silanol groups was performed using TOF-SIMS. To conduct the evaluation, calibration curves were created using several types of samples with different concentrations. In the measurement examples, the silanol groups on the surfaces of samples with different materials and conditions were compared. Measurement method: TOF-SIMS Product fields: LSI, memory, electronic components Analysis purpose: Composition evaluation and identification For more details, please download the materials or contact us.

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Analysis of LSI, memory, and electronic components.

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[Analysis Case] Evaluation of the Surface Silanol Groups_C0377

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