[Analysis Case] Identification of Fluorine-based Lubricants and Polymers using TOF-SIMS
Identify the contaminating components and estimate the contamination occurrence process.
There are various types of fluorine-based compounds. During the investigation of contamination sources, performing qualitative analysis of the types of fluorine compounds allows us to examine the processes that caused the contamination. Therefore, we conducted an analysis using surface-sensitive TOF-SIMS to determine what is adhering to areas with good water repellency. By utilizing the fact that the fragment patterns of the fluorine-based oils used in each process differ by type, we performed a fingerprint matching and found that a substance corresponding to the oil from process B was adhering.
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Applications/Examples of results
Analysis of electronic components, manufacturing equipment, and parts.