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Interference peak removal process in quantitative analysis

X-ray photoelectron spectroscopy (XPS)

In XPS analysis, in addition to the photoelectron peaks used for evaluation, photoelectron peaks from other orbitals and Auger peaks from X-ray excitation are also detected. Depending on the combination of elements, these sub-peaks can overlap with the target peak and interfere with the evaluation. *Typically, a strong photoelectron peak emitted from an inner shell level close to the outer shell is used. In the quantitative calculations of XPS analysis, the removal of such interfering peaks is primarily performed using the following two methods: 1. Removal using sensitivity coefficient ratios 2. Removal using waveform separation

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/73…

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For detailed data, please refer to the catalog.

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Applications/Examples of results

Analysis of lighting, power devices, LSI, memory, electronic components, manufacturing equipment, parts, and biotechnology.

Interference peak removal process in quantitative calculations_B0189

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!