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[Analysis Case] Evaluation of "Water" in Si Oxide Films and ITO Films using SIMS

Depth-direction analysis of hydrogen using 'heavy water (D2O) treatment'

We will introduce a case where the permeability of water (H2O) in a thin film with a thickness of less than 1 µm was evaluated by measuring the distribution of deuterium (D) in the film. When hydrogen (H) is originally present in the thin film, it is difficult to distinguish whether the hydrogen is due to the influence of water. Therefore, treatment with heavy water (D2O) was performed, and the distribution of the naturally occurring isotope deuterium was measured in the depth direction using SIMS. By examining the depth distribution of deuterium, it is possible to estimate how deep the water has penetrated.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/36…

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Trace concentration evaluation, degradation investigation, reliability assessment.

[Analysis Case] Evaluation of the State of the Electrode Interface in Organic Thin-Film Solar Cells and Assessment of the Dispersion State of the Organic Film_C0177

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