[Analysis Case] Evaluation of Damage Layer on Polymer Surface Due to Ion Irradiation
By using GCIB (Ar cluster), it is possible to evaluate the composition and thickness of the damaged layer.
By irradiating the surface of polymer materials with ions, changes in surface properties occur. Utilizing these changes, research is being conducted in a wide range of fields, including the development of functional materials. Evaluating the changes that occur in the surface state after ion irradiation is important for efficient research and development. In TOF-SIMS analysis, using a GCIB (Gas Cluster Ion Beam) for the sputtering ion beam makes it possible to evaluate the composition and thickness of the damage layer caused by ion irradiation on the surface of polymer materials.
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Applications/Examples of results
Analysis of electronic components.