[Analysis Case] Depth Direction Analysis of Thin Carbon Films
Depth-direction analysis of diamond-like carbon (DLC) and graphene is possible.
TOF-SIMS allows for the acquisition of mass spectra in the depth direction, enabling the analysis of components in very thin layers through qualitative assessment of each layer. In this case, we analyzed a hard disk in the depth direction. As a result, it was found that the diamond-like carbon (DLC) layer formed on the surface has a two-layer structure, with a nitrogen-containing C layer on the surface side and a layer consisting solely of C on the deeper side. This method can also be applied to the depth analysis of graphene films. Measurement method: TOF-SIMS Product fields: Electronic components, manufacturing equipment, parts Analysis objectives: Composition evaluation, identification, composition distribution evaluation For more details, please download the materials or contact us.
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For more details, please download the materials or contact us.
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Applications/Examples of results
Analysis of electronic components, manufacturing equipment, and parts.