[Analysis Case] High-Precision Quantification of the sp2/(sp2+sp3) Ratio of DLC Films
High-precision analysis using XAFS
DLC (diamond-like carbon) films, which are widely used as coating materials in various fields, are composed of a mixture of carbon elements with sp3 hybrid orbitals corresponding to a diamond structure and carbon elements with sp2 hybrid orbitals corresponding to a graphite structure when viewed from a microscopic perspective. One indicator that determines the properties of DLC films is the sp2/(sp2+sp3) ratio. High-precision quantification of the sp2/(sp2+sp3) ratio in DLC films is possible using XAFS.
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Analysis of electronic components, manufacturing equipment, parts, and daily necessities.