[Analysis Case] Evaluation of "Water" in Quartz and Glass Using SIMS
Depth-direction analysis of hydrogen using 'heavy water (D2O) treatment'
We will introduce a case where the permeability of water (H2O) in glass materials was evaluated by measuring the distribution of deuterium (D). When hydrogen (H) is already present, it is difficult to distinguish whether the hydrogen is due to the influence of water. Therefore, treatment with heavy water (D2O) was performed, and the distribution of the stable isotope deuterium was measured in depth using SIMS. By examining the depth distribution of deuterium, it is possible to estimate how deep the water has penetrated.
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Applications/Examples of results
Analysis of displays and electronic components.