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Outgas analysis using a gas concentration device with GC/MS.

B0241.jpg
B0241.jpg

Outgas analysis using a gas concentration device with GC/MS.

GC/MS: Gas Chromatography-Mass Spectrometry

The gas generation concentration device is an apparatus that traps gases generated from samples placed inside a chamber into a collection tube. By trapping in the collection tube, trace amounts of desorbed components can be concentrated and measured with high sensitivity using GC/MS. Depending on the type of sample, a suitable size of chamber can be selected, and it can accommodate heating up to 350°C. - Compatible with relatively large samples (on the order of several centimeters) - Allows for measurements with 2 to 3 orders of magnitude higher sensitivity compared to the headspace method - Enables evaluation of organic contamination from both sides of a wafer - Allows for evaluation of organic contamination on photomasks (reticles) - Quantitative analysis using hexadecane, decamethylcyclopentasiloxane, etc., is possible.

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Analysis of electronic components, manufacturing equipment, parts, and daily necessities.

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Outgas analysis using a gas concentration device with GCMS_B0241

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