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[Analysis Case] Depth Direction Analysis of XPS on the Micron (μm) Order

C0529_XPSによるμmオーダーの深さ方向分析.jpg

[Analysis Case] Depth Direction Analysis of XPS on the Micron (μm) Order

C0529_XPSによるμmオーダーの深さ方向分析.jpg
C0529_XPSによるμmオーダーの深さ方向分析.jpg

Depth direction analysis will be conducted to a depth of several micrometers.

XPS is a surface-sensitive technique widely used for evaluating sample surfaces, but when combined with ion etching, it allows for depth analysis. In addition to the compositional distribution in the depth direction, XPS also enables the assessment of bonding states, making it suitable for investigating the causes of discoloration on the surfaces of device components. This document presents a case study evaluated by XPS regarding the discoloration of the blades of a turbo molecular pump.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/46…

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Analysis of manufacturing equipment and components.

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[Analysis Case] Depth Direction Analysis of XPS on the Micron (μm) Order_C0529

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