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[Analysis Case] Component Analysis of Water Repellent Areas

C0686.png
C0686.png

[Analysis Case] Component Analysis of Water Repellent Areas

TOF-SIMS enables wide-area imaging evaluation of multiple components.

To investigate the causes of defects such as poor adhesion, it is important to gain insights into the surfaces of wafers and devices. In this instance, hydrophobic areas were observed on a silicon wafer, prompting wide-area imaging using TOF-SIMS. As a result, components estimated to be silicone oil, CF-based grease, and paraffin oil were identified from the hydrophobic areas. TOF-SIMS typically has a measurement field of view up to 500μm square, but by moving the stage during measurement, it is possible to evaluate wide-area distributions. Measurement method: TOF-SIMS Product fields: Devices, Displays, Electronic Components, Manufacturing Equipment Analysis objectives: Qualitative, Imaging, Composition Distribution Evaluation For more details, please download the materials or contact us.

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Analysis of lighting, displays, oxide semiconductors, power devices, optical devices, LSI/memory, electronic components, manufacturing equipment and parts, polymer materials, and everyday goods.

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[Analysis Case] Component Analysis of Water Repellent Area_C0686

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