一般財団法人材料科学技術振興財団 MST Official site

Reproducibility of SIMS analysis data

It is possible to evaluate the amount of impurities with high reproducibility.

In the manufacturing of semiconductor devices, the control of impurities such as dopants is a crucial process. When focusing on ion implantation, even slight differences can affect quality and performance, making precise control necessary. The high reproducibility of SIMS analysis is ideal for the development and maintenance of these processes.

MST Homepage

basic information

For more details, please download the materials or contact us.

Price range

Delivery Time

Applications/Examples of results

Analysis of LSI and memory.

Reproducibility of SIMS Analysis Data_B0301

TECHNICAL

Distributors

Recommended products