Reproducibility of SIMS analysis data
It is possible to evaluate the amount of impurities with high reproducibility.
In the manufacturing of semiconductor devices, the control of impurities such as dopants is a crucial process. When focusing on ion implantation, even slight differences can affect quality and performance, making precise control necessary. The high reproducibility of SIMS analysis is ideal for the development and maintenance of these processes.
basic information
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Applications/Examples of results
Analysis of LSI and memory.