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[Analysis Case] Simultaneous Qualitative Analysis of Inorganic and Organic Contaminants/Adhesives on Wafers

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[Analysis Case] Simultaneous Qualitative Analysis of Inorganic and Organic Contaminants/Adhesives on Wafers

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Simultaneous measurement of inorganic and organic components in minute specific areas.

TOF-SIMS has features such as simultaneous evaluation of organic and inorganic materials, capability for micro-area analysis, and high sensitivity for analyzing the very surface, making it effective for residue investigation in cleaning processes. An example is presented where pure water was dried on a silicon wafer. Optical microscopy only reveals slight point-like foreign substances and cloudiness. However, the results measured by TOF-SIMS showed that in the contaminated areas, organic components such as hydrocarbons, PDMS, and amides, which tend to adsorb naturally, were aggregated.

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Measurement method: TOF-SIMS Product field: LSI, memory, electronic components Analysis purpose: Composition evaluation, identification

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Analysis of LSI, memory, and electronic components.

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[Analysis Case] Simultaneous Qualitative Analysis of Inorganic and Organic Contaminants/Adhesions on Wafers_C0034

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[Analysis Case] Simultaneous Qualitative Analysis of Inorganic and Organic Contaminants/Adhesives on Wafers

一般財団法人材料科学技術振興財団　MST

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一般財団法人材料科学技術振興財団　MST
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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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