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[Analysis Case] Simultaneous Qualitative Analysis of Inorganic and Organic Contaminants/Adhesives on Wafers

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[Analysis Case] Simultaneous Qualitative Analysis of Inorganic and Organic Contaminants/Adhesives on Wafers

Simultaneous measurement of inorganic and organic components in minute specific areas.

TOF-SIMS has features such as simultaneous evaluation of organic and inorganic materials, capability for micro-area analysis, and high sensitivity for analyzing the very surface, making it effective for residue investigation in cleaning processes. An example is presented where pure water was dried on a silicon wafer. Optical microscopy only reveals slight point-like foreign substances and cloudiness. However, the results measured by TOF-SIMS showed that in the contaminated areas, organic components such as hydrocarbons, PDMS, and amides, which tend to adsorb naturally, were aggregated.

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Measurement method: TOF-SIMS Product field: LSI, memory, electronic components Analysis purpose: Composition evaluation, identification

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Analysis of LSI, memory, and electronic components.

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[Analysis Case] Simultaneous Qualitative Analysis of Inorganic and Organic Contaminants/Adhesions on Wafers_C0034

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