一般財団法人材料科学技術振興財団　MST Official site

Contact Us

[Analysis Case] Metal Contamination Analysis of Si Wafer Surface (B0233)

2.png

[Analysis Case] Metal Contamination Analysis of Si Wafer Surface (B0233)

2.png
2.png

It is possible to obtain a large amount of metal element information at once through qualitative and semi-quantitative analysis!

We offer metal contamination analysis of Si wafers (B0233). The purpose of metal contamination analysis of Si wafer surfaces using ICP-MS includes not only the contamination assessment of the Si wafer itself but also the evaluation of contamination within semiconductor devices and the assessment of the working environment due to Si wafer exposure. Therefore, the analysis of Si wafer surfaces is conducted for various purposes. ICP-MS analysis allows for the highly sensitive measurement of metal contamination on Si wafer surfaces, and it is also possible to specify the evaluation area according to the purpose. [Measurement Method] ■ [ICP-MS] Inductively Coupled Plasma Mass Spectrometry *For more details, please download the PDF or feel free to contact us.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/35…

basic information

【Product Fields】 ■Manufacturing Equipment and Parts ■Environment *For more details, please download the PDF or feel free to contact us.

Price range

Delivery Time

Applications/Examples of results

【Analysis Purpose】 ■Trace Concentration Evaluation *For more details, please download the PDF or feel free to contact us.

catalog（1）

Download All Catalogs

Metal Contamination Analysis of Si Wafer Surface_B0233

PRODUCT

Contact this catalog

Recommended products

  • [Analysis Case] Secondary Battery

[Analysis Case] Energy Profile of Li Ion Insertion/Extraction Process

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Electronic Components

[Analysis Case] Structural Analysis of End Groups of Polycarbonate

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Cosmetics

[Analysis Case] NMR Chemical Shift Simulation of Organic Molecules

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Manufacturing Equipment and Components

[Analysis Case] Oil Analysis (GC/MS Edition)

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Biotechnology

[Analysis Case] Fine Structure of Hair Cross-Section (S)TEM Analysis

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Cosmetics

[Analysis Case] (S)TEM Observation by Negative Staining

一般財団法人材料科学技術振興財団　MST

  • Analysis Case: Daily Necessities

[Analysis Case] (S)TEM Observation of Polymer Materials Using Electronic Staining

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] LSI・Memory

[Analysis Case] Precursor Adsorption Simulation in ALD Film Formation

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Electronic Components

[Analysis Case] Evaluation of Crystallinity of Carbon Materials Using Raman Mapping

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Electronic Components

[Analysis Case] Evaluation of Composition Distribution of Organic Films by Raman Mapping

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Biotechnology

[Analysis Case] Imaging of the Cuticle

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Electronic Components

[Analysis Case] Dynamic Viscoelastic Evaluation of PDMS using AFM

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] LSI・Memory

[Analysis Case] Evaluation of DC Voltage Dependence of Carriers in Semiconductors

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Secondary Battery

[Analysis Case] Structural Evaluation of Lithium-Ion Secondary Battery Anode Materials

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Manufacturing Equipment and Components

[Analysis Case] Three-Dimensional Structural Analysis of 3D Printed Objects

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Biotechnology

[Analysis Case] Evaluation of Mechanical Properties of Hair Cross-Sections Prepared by Microtome Method

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Secondary Battery

[Analysis Case] Local Area Evaluation of Positive Electrode Active Material in Secondary Batteries (C0614)

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Fuel Cell

[Analysis Case] Particle Size Analysis of Au Nanoparticles Using X-ray Small Angle Scattering Method

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Manufacturing Equipment and Components

[Analysis Case] Evaluation of Stainless Steel Passive Films Compliant with SEMI Standards

一般財団法人材料科学技術振興財団　MST

  • Analysis Case: Daily Necessities

[Analysis Case] Identification Analysis of Pigments by Direct MS Method (C0611)

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] LSI・Memory

[Analysis Case] SEM Observation of Wide-Area Cross-Section Using Xe-PFIB

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] LSI・Memory

[Analysis Case] Theoretical Calculation of Fe/MgO/Fe Junction System (C0583)

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Electronic Components

[Analysis Case] Composite Analysis of Specific Areas within Electronic Devices (C0572)

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] LSI・Memory

[Analysis Case] Evaluation of Composition Distribution of Ultrathin Films by ARXPS (C0550)

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Food

[Analysis Case] Quantitative Analysis of Glucosylceramide in Konjac

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Fuel Cell

[Analysis Case] Evaluation of the Chemical State of RuO2 Catalyst by in-situ XAFS

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Display

[Analysis Case] NMR - Spectrum Separation of Mixed Samples Using DOSY Method

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Display

[Analysis Case] NMR - Spectrum Separation of Mixed Samples Using Filters

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Cosmetics

[Analysis Case] Quantitative Analysis Using NMR 31P Nucleus (B0278)

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Manufacturing Equipment and Components

[Analysis Case] Metal Contamination Analysis of Si Wafer Surface (B0233)

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Secondary Battery

[Analysis Case] TEM Analysis under Atmosphere Control and Cooling (B0156)

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] LSI・Memory

[Analysis Case] Composition Analysis of Particles on a Wafer

一般財団法人材料科学技術振興財団　MST

  • Measurement Method: Failure Analysis

Observation of structural changes in metallic materials through tensile testing using in situ X-ray CT.

一般財団法人材料科学技術振興財団　MST

  • Measurement Method: Failure Analysis

[Analysis Case] Evaluation of Metal Impurities in the Metal Film and Interface of the Device

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Fuel Cell

Accelerating research and development, [new] surface analysis service launched!

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Simultaneous Qualitative Analysis of Inorganic and Organic Contaminants/Adhesives on Wafers

一般財団法人材料科学技術振興財団　MST

  • [Measurement Method] Other Measurement Methods

[Analysis Case] Imaging of Brain Lipids

一般財団法人材料科学技術振興財団　MST

  • [Measurement Method] Other Measurement Methods

[Analysis Case] Emission Analysis of Perovskite Solar Cells

一般財団法人材料科学技術振興財団　MST

  • [Measurement Method] Other Measurement Methods

Quantification of cellulose, hemicellulose, and lignin in wood biomass.

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Depth Direction Analysis of Components in SiON Ultra-Thin Films

一般財団法人材料科学技術振興財団　MST

  • [Measurement Method] Other Measurement Methods

[Analysis Case] Mechanical Property Evaluation Simulation Using Molecular Dynamics Calculations

一般財団法人材料科学技術振興財団　MST

  • [Measurement Method] Other Measurement Methods

[Analysis Case] Analysis of Bacteria Using DNA Analysis

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Outgassing Analysis of Resin for 3D Printers

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Impurity Evaluation of MLCC Using Diagonal Processing MLCC

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Comprehensive Evaluation of Positive Electrode Active Materials in Secondary Batteries

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Evaluation of Resistance Values and Li Distribution in Secondary Battery Cathodes

一般財団法人材料科学技術振興財団　MST

Distributors

一般財団法人材料科学技術振興財団　MST
一般財団法人材料科学技術振興財団　MST
Official site
Phone number/address

MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

Product/Service List (738)