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[Analysis Case] Contamination Analysis in Vacuum Equipment

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[Analysis Case] Contamination Analysis in Vacuum Equipment

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It is possible to evaluate the causes of contamination in vacuum devices, such as oil backs and grease!

Vacuum devices that utilize the characteristic of low gas molecular density in a space are used in various applications such as thin film formation and surface analysis in the manufacturing process of electronic components. Since the chamber of a vacuum device is a closed space, the presence of trace amounts of molecules can easily cause contamination within the device. To suppress contamination, it is necessary to conduct investigations to identify contamination sources such as pumps, devices, and samples. This document presents a case study investigating contamination within a vacuum device using TOF-SIMS.

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Measurement Method: TOF-SIMS Product Field: LSI, Memory, Electronic Components, Manufacturing Equipment and Parts Analysis Purpose: Composition Evaluation and Identification

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Analysis of LSI, memory, electronic components, and manufacturing equipment and parts.

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[Analysis Case] Contamination Analysis in Vacuum Equipment_C0741

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