[RBS] Rutherford Backscattering Spectrometry

It is a method for measuring the energy and intensity of ions scattered backward by Rutherford scattering after irradiating a solid sample with an ion beam.

RBS is a method that irradiates solid samples with ion beams (H+, He++) and measures the energy and intensity of ions scattered backward through Rutherford scattering. By measuring the kinetic energy of the scattered He ions and examining the mass number of the colliding atoms, it is possible to evaluate the components and layer structure of the analyzed sample. Additionally, by directing He ions at a solid sample and measuring the H ions scattered forward, it is also possible to assess the hydrogen concentration in the sample. This measurement technique is known as Hydrogen Forward-Scattering Spectroscopy (HFS). It is also referred to as Elastic Recoil Detection Analysis (ERDA). - Analysis of elements from B to U is possible (H is also possible through HFS) - Quantitative analysis can be performed without using standard samples - Depth profile of composition distribution can be obtained - Density can be calculated from film thickness information obtained by other methods - Sensitivity and accuracy tend to increase with heavier elements - Non-destructive analysis

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basic information

When ions such as He are accelerated and irradiated onto a solid surface, some of the ions are elastically scattered by the atoms in the sample. The energy of the scattered ions depends on the mass number of the colliding atoms and their position (depth) from the surface. By analyzing this energy, it is possible to identify the elements that make up the thin film and investigate the compositional depth profile. Due to the high reliability of data such as scattering cross-sections and energy loss (stopping power) in the sample used for quantification, depth profile composition analysis can be performed without using standard samples.