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[Analysis Case] Evaluation of Impurity Concentration in AlGaN UV Sensors Using SIMS

C0232.jpg

[Analysis Case] Evaluation of Impurity Concentration in AlGaN UV Sensors Using SIMS

C0232.jpg
C0232.jpg

A lineup of AlGaN standard samples with various Al compositions.

In SIMS analysis, it is essential to use standard samples with a composition close to that of the measurement sample in order to obtain more reliable concentration quantification values. By offering a wide range of AlGaN standard samples with varying Al content, we have been able to more accurately determine the impurity concentration in AlGaN, which is used in UV LEDs and UV sensors. We will present a case study where SIMS analysis of a UV sensor was conducted to quantify the concentration of the dopant, Si.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/36…

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Analysis of lighting and optical devices.

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[Analysis Case] High-Precision Evaluation of Impurity Concentration in AlGaN UV Sensors Using SIMS_C0232

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