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[Analysis Case] SIMS Analysis of Compound Layered Structure Samples

c0269.jpg
c0269.jpg

[Analysis Case] SIMS Analysis of Compound Layered Structure Samples

Analysis is possible after selectively removing the compound layer through preprocessing.

In SIMS analysis of layered structure samples, there is a concern that in structures where the layer of interest is located at a deep position from the sample surface, the depth resolution may degrade due to the influence of the concentration distribution of the upper layers. In such cases, it is effective to remove the upper layers through pretreatment before analysis. This document presents an example of selectively and progressively removing layers from InP/InGaAs-based SHBT (Single Heterojunction Bipolar Transistor) samples.

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Analysis of lighting, displays, power devices, and optical devices.

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[Analysis Case] SIMS Analysis of Compound Layered Structure Sample_C0269

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