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Regarding the depth conversion of SRA

b0197.jpg

Regarding the depth conversion of SRA

b0197.jpg
b0197.jpg

SRA: Spread Resistance Measurement Method

SR measurement involves diagonally polishing the sample and moving two probes in contact with the sample surface while measuring the electrical resistance directly beneath. The depth from the sample surface at a certain measurement point is determined by the product of the value of Sinθ (bevel angle) when the angle of diagonal polishing of the sample is θ and the distance from the bevel edge to that measurement point. The distance from the bevel edge is calculated as [X-step] × [number of measurement points].

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Analysis of power devices, LSI, and memory.

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Regarding the depth conversion of SRA_B0197

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