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About the concentration conversion of SRA.

b0196.jpg
b0196.jpg

About the concentration conversion of SRA.

SRA: Spread Resistance Measurement Method

1. Measure the spreading resistance (Ω) directly beneath the surface of the sample that has been polished at an angle by contacting two probes. 2. Create a calibration curve from the measurements of the standard sample and use it to convert the resistance to resistivity (Ω·cm). Additionally, perform distribution corrections as needed through volume correction. *) The calibration curve varies depending on the conductivity type (p-type/n-type) and the surface orientation. 3. Use the relationship between resistivity and carrier concentration*) to calculate the carrier concentration (/cm³).

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Analysis of power devices, LSI, and memory.

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About the concentration conversion of SRA_B0196

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