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Large-diameter imaging SIMS using RAE detectors

SIMS: Secondary Ion Mass Spectrometry

Imaging SIMS is effective for obtaining spatial distribution information of hydrogen and impurities at ppm levels. By using a RAE (Resistive Anode Encoder) detector for projection-type imaging SIMS, it is possible to obtain distribution images with a larger diameter and deeper regions compared to the commonly used scanning methods in imaging analysis.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/93…

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For detailed data, please refer to the catalog.

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Applications/Examples of results

Analysis of power devices, LSI, and memory.

Large-diameter imaging SIMS_B0194 using RAE detector

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