Large-diameter imaging SIMS using RAE detectors
SIMS: Secondary Ion Mass Spectrometry
Imaging SIMS is effective for obtaining spatial distribution information of hydrogen and impurities at ppm levels. By using a RAE (Resistive Anode Encoder) detector for projection-type imaging SIMS, it is possible to obtain distribution images with a larger diameter and deeper regions compared to the commonly used scanning methods in imaging analysis.
basic information
For detailed data, please refer to the catalog.
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Applications/Examples of results
Analysis of power devices, LSI, and memory.