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Large-diameter imaging SIMS using RAE detectors

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Large-diameter imaging SIMS using RAE detectors

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b0194.jpg

SIMS: Secondary Ion Mass Spectrometry

Imaging SIMS is effective for obtaining spatial distribution information of hydrogen and impurities at ppm levels. By using a RAE (Resistive Anode Encoder) detector for projection-type imaging SIMS, it is possible to obtain distribution images with a larger diameter and deeper regions compared to the commonly used scanning methods in imaging analysis.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/93…

basic information

For detailed data, please refer to the catalog.

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Applications/Examples of results

Analysis of power devices, LSI, and memory.

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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