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[Analysis Case] TMAH Analysis Case in Si-containing Solution by IC Method

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[Analysis Case] TMAH Analysis Case in Si-containing Solution by IC Method

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c0359.jpg

The measurement of amines is possible using the IC (Ion Chromatography) method.

Tetramethylammonium hydroxide (TMAH) is used as a developing solution and etching solution in semiconductors. When measuring the concentration of TMAH solution used in Si etching solutions, the large amount of dissolved Si can become an impurity and affect the measurement results. However, evaluation using the IC (ion chromatography) method allows for quantitative analysis of TMAH concentration without being influenced by Si.

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[Analysis Case] TMAH Analysis Case in Si-containing Solution by IC Method_C0359

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