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Points to consider in foreign matter analysis of AES.

AES: Auger Electron Spectroscopy

In AES analysis, it is possible to evaluate the elemental composition of the surface of minute foreign substances, making it useful for foreign substance analysis in small areas. However, due to the effects of damage from electron beams and other sources, there is a possibility that the foreign substances may change or disappear. Particularly when halogen elements are involved, the impact can be significant, and caution is required. An example of a case where a foreign substance disappeared during SEM observation or AES measurement is shown, specifically regarding NaCl particles on a Si wafer, along with the results of the AES analysis.

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Analysis of LSI and memory.

Points to Consider in Foreign Matter Analysis of AES: Risk of Foreign Matter Disappearance Due to Electron Beams_B0206

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