[Analysis Case] Atomic Column Observation of Strontium Titanate SrTiO3
High-resolution STEM observation using Cs-corrected STEM
ABF-STEM images (scanning transmission annular dark field images) allow for the direct observation of atomic positions of light elements. Simultaneous acquisition with HAADF-STEM images enables more detailed structural analysis. In this case, we present an example of observing atomic columns of strontium titanate (SrTiO3). By combining EDX elemental distribution analysis, we can visually clarify the distribution of atoms. Measurement methods: TEM・EDX Product fields: LSI・Memory Analysis purposes: Shape evaluation・Structural evaluation For more details, please download the materials or contact us.
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Applications/Examples of results
Analysis of LSI and memory.