[Analysis Case] Evaluation of the Condition of Foreign Matter with Surface Oxidation Film
Evaluation of aluminum hydroxide Al(OH)3 and aluminum oxide Al2O3 is possible.
If you want to qualitatively evaluate metallic foreign substances, analyzing only the very surface may result in information about the oxide film present on the surface of the foreign substance, and you may not obtain information about the foreign substance itself. By performing depth analysis using TOF-SIMS, it is possible to evaluate the composition and state of the foreign substance located deeper than the oxide film. This document presents case studies evaluating the state of three locations that are believed to contain aluminum-based foreign substances.
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Applications/Examples of results
Analysis of optical devices, LSI, memory, electronic components, manufacturing equipment, and parts.