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[Analysis Case] Evaluation of the Condition of Foreign Matter with Surface Oxidation Film

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[Analysis Case] Evaluation of the Condition of Foreign Matter with Surface Oxidation Film

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Evaluation of aluminum hydroxide Al(OH)3 and aluminum oxide Al2O3 is possible.

If you want to qualitatively evaluate metallic foreign substances, analyzing only the very surface may result in information about the oxide film present on the surface of the foreign substance, and you may not obtain information about the foreign substance itself. By performing depth analysis using TOF-SIMS, it is possible to evaluate the composition and state of the foreign substance located deeper than the oxide film. This document presents case studies evaluating the state of three locations that are believed to contain aluminum-based foreign substances.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/5/…

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Analysis of optical devices, LSI, memory, electronic components, manufacturing equipment, and parts.

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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