[Analysis Case] Qualitative and Imaging Analysis of Micro Areas Using TOF-SIMS
Qualitative and imaging analysis of foreign substances in the sub-micrometer order and micro-regions is possible.
TOF-SIMS allows for simultaneous elemental analysis and molecular information analysis of organic and inorganic substances through mass spectra obtained by locally analyzing specific areas, making it effective for evaluating foreign substances and micro-regions. This document summarizes examples of analysis in sub-micron order micro-regions. Samples that were sputter-processed with FIB on layered structures were measured using TOF-SIMS. Evaluation of sub-micron order micro-regions has been achieved.
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Applications/Examples of results
Analysis of LSI, memory, and electronic components.