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[Analysis Case] Qualitative and Imaging Analysis of Micro Areas Using TOF-SIMS

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[Analysis Case] Qualitative and Imaging Analysis of Micro Areas Using TOF-SIMS

c0449.jpg
c0449.jpg

Qualitative and imaging analysis of foreign substances in the sub-micrometer order and micro-regions is possible.

TOF-SIMS allows for simultaneous elemental analysis and molecular information analysis of organic and inorganic substances through mass spectra obtained by locally analyzing specific areas, making it effective for evaluating foreign substances and micro-regions. This document summarizes examples of analysis in sub-micron order micro-regions. Samples that were sputter-processed with FIB on layered structures were measured using TOF-SIMS. Evaluation of sub-micron order micro-regions has been achieved.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/37…

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Analysis of LSI, memory, and electronic components.

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[Analysis Case] Qualitative and Imaging Analysis of Micro Areas by TOF-SIMS_C0449

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