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[Analysis Case] Corrosive Gas Analysis by TDS

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[Analysis Case] Corrosive Gas Analysis by TDS

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You can check for gases that have a negative impact on the product.

Corrosive gases such as etching gases have a significant impact on the degradation of semiconductors, electronic components, and devices. Below, we present an example of capturing corrosive gases using TDS (Temperature-Programmed Desorption Gas Analysis). It was confirmed that HCl, a corrosive gas, desorbs with the increase in temperature of the sample. Since TDS can capture desorption in the m/z range of 2 to 199 while heating, it is effective for investigating the types and amounts of corrosive gases as well as their temperature dependence of desorption.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/43…

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Analysis of LSI, memory, electronic components, manufacturing equipment, and parts.

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[Analysis Case] Corrosive Gas Analysis by TDS_C0500

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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