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[Analysis Case] Corrosive Gas Analysis by TDS

You can check for gases that have a negative impact on the product.

Corrosive gases such as etching gases have a significant impact on the degradation of semiconductors, electronic components, and devices. Below, we present an example of capturing corrosive gases using TDS (Temperature-Programmed Desorption Gas Analysis). It was confirmed that HCl, a corrosive gas, desorbs with the increase in temperature of the sample. Since TDS can capture desorption in the m/z range of 2 to 199 while heating, it is effective for investigating the types and amounts of corrosive gases as well as their temperature dependence of desorption.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/43…

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For detailed data, please refer to the catalog.

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Applications/Examples of results

Analysis of LSI, memory, electronic components, manufacturing equipment, and parts.

[Analysis Case] Corrosive Gas Analysis by TDS_C0500

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