[Analysis Case] De-gassing Evaluation During Temperature Holding by TDS
You can investigate the changes in degassing intensity while maintaining the temperature.
TDS is a method for real-time detection of desorbed gases while heating the sample in high vacuum or maintaining a constant temperature. An example is shown where a SiN film on a Si substrate was held at 350°C to investigate the amount of H2 desorption. In simple heating, a desorption peak was observed around 500°C, but during the temperature hold at 350°C, the detection intensity of H2 decreased, and a desorption peak was observed upon re-heating.
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For detailed data, please refer to the catalog.
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Applications/Examples of results
Analysis of LSI, memory, power devices, manufacturing equipment, and components.