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[Analysis Case] Evaluation of Diffusion Layer Shape of Image Sensors Using SCM

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This document presents case studies evaluating the diffusion layer of image sensors in smartphones. Using a scanning capacitance microscope (SCM) capable of determining the p/n type of semiconductors, we assessed the distribution of the diffusion layer. By combining the results from cross-sectional and planar SCM, we obtained complementary and extensive information. SCM is one of the effective tools for evaluating the quality of image sensor diffusion layers and for failure analysis.

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Analysis of optical devices.

[Analysis Case] Evaluation of Diffusion Layer Shape of Image Sensor by SCM_C0534

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