[Analysis Case] STEM/EDX and Image Simulation for Crystal Structure Evaluation
The evaluation of the crystal structure can be performed based on the STEM images and the results of atomic composition measurements.
By measuring the sample, it is possible to evaluate the crystal structure through the combination of results obtained and simulations. This document introduces a case study in which the crystal structure is discussed by comparing the results obtained from HAADF-STEM and EDX measurements on polycrystalline neodymium magnets with simulated images using the respective measurement conditions. The combination of measurement results and computational simulation results allows for a deeper understanding of the crystal structure.
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Applications/Examples of results
Analysis of LSI, memory, power devices, optical devices, solar cells, secondary batteries, and oxide semiconductors.