[Analysis Case] Observation of Crystal Grains on Cu Surface Using Scanning Ion Microscopy
It is possible to obtain insights into the size and distribution of crystal grains in metallic polycrystals.
The Scanning Ion Microscope (SIM) is a method that irradiates a solid sample with an ion beam and detects the secondary electrons generated. Since secondary electrons produce contrast according to the crystal orientation of each grain, it is possible to easily obtain insights into the size and distribution of crystal grains in polycrystalline metals such as Cu and Al using SIM. This document presents an example of measurements where the surface of Cu was observed using SIM.
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Applications/Examples of results
Analysis of LSI and memory.