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Evaluation avoiding duplication of Oji Peak by HAXPES.

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Evaluation avoiding duplication of Oji Peak by HAXPES.

Comparison of spectra obtained from Ga line (HAXPES) and Al line/Mg line (XPS) measurements.

In HAXPES, hard X-rays (Ga radiation) are used for excitation, which results in different positions of the Auger peaks compared to the Al and Mg radiation typically used in standard XPS measurements. Therefore, even in samples where the photoelectron peaks and Auger peaks overlap in Al and Mg measurements, this overlap can be avoided in Ga measurements, allowing for a detailed evaluation of the bonding states. This document presents the spectra of Kovar (an alloy of Fe, Ni, and Co) and GaN measured using Ga radiation (equipped with HAXPES) and Al and Mg radiation (equipped with XPS).

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Analysis of power devices, electronic components, solar cells, secondary batteries, fuel cells, and manufacturing equipment and parts.

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Evaluation avoiding duplication of OGP peak by HAXPES_B0273

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