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[Analysis Case] Analysis of α-Alumina (α-Al2O3) by TDS

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[Analysis Case] Analysis of α-Alumina (α-Al2O3) by TDS

Thermal desorption gas analysis of ceramics

Thermally stable α-alumina is used in a wide range of applications, including heat-resistant materials, semiconductor packages, and components of semiconductor manufacturing equipment. Among these, dense α-alumina is also used as a material for vacuum devices. However, the gases generated when such materials are heated can adversely affect products and equipment, making it important to understand the outgassing from these materials. In this report, we present a case study comparing the outgassing amounts of porous and dense α-alumina using TDS analysis (temperature-programmed desorption gas analysis).

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Measurement method: TDS Product field: Manufacturing equipment, components, LSI, memory Analysis purpose: Trace concentration evaluation, degassing analysis by heating

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Analysis of manufacturing equipment, parts, LSI, and memory.

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[Analysis Case] Analysis of α-Alumina (α-Al2O3) by TDS_C0578

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