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[Analysis Case] Evaluation of Composition Distribution of Ultrathin Films by ARXPS (C0550)

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[Analysis Case] Evaluation of Composition Distribution of Ultrathin Films by ARXPS (C0550)

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It is possible to evaluate the depth profile of ultra-thin films on the substrate!

We offer composition distribution evaluation of ultra-thin films using ARXPS (Angle-Resolved X-ray Photoelectron Spectroscopy) (C0550). Photoelectrons emitted by X-ray irradiation are detected at different take-off angles, and spectra with varying detection depths are used to evaluate the depth profile very close to the sample surface. This method improves depth resolution and has the advantage of no compositional changes due to selective sputtering or mixing, making it effective for evaluating the depth profiles of ultra-thin films (on the order of a few nanometers) on substrates. [Measurement Method / Processing Method] ■ [XPS] X-ray Photoelectron Spectroscopy *For more details, please download the PDF or feel free to contact us.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/48…

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【Product Field】 ■LSI・Memory *For more details, please download the PDF or feel free to contact us.

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Applications/Examples of results

【Analysis Objectives】 ■Composition Distribution Evaluation ■Structural Evaluation *For more details, please download the PDF or feel free to contact us.

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[Analysis Case] Evaluation of Composition Distribution of Ultra-Thin Films by Angle-Resolved XPS (ARXPS) _C0550

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