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[Analysis Case] Evaluation of Dopant Concentration Distribution in a-Si Thin Film Solar Cells Using SIMS

C0233.jpg

[Analysis Case] Evaluation of Dopant Concentration Distribution in a-Si Thin Film Solar Cells Using SIMS

C0233.jpg
C0233.jpg

Select measurement conditions according to the target element.

We will introduce a case where the concentration distribution of dopants in a-Si (amorphous silicon) was quantitatively evaluated in flexible thin-film Si solar cells. The sample, sealed with resin, was disassembled, and SIMS analysis was conducted. In the analysis of B (Figure 3), measurements were performed with enhanced depth resolution because it exists in shallow areas on the surface side. In the analysis of P (Figure 4), a large amount of H exists in a-Si, causing mass interference; therefore, measurements were conducted under conditions that separated H from Si using high mass resolution methods to detect only P.

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Analysis of solar cells.

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[Analysis Case] Evaluation of Dopant Concentration Distribution in a-Si Thin Film Solar Cells Using SIMS_C0233

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