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[Analysis Case] Wide-area Quantitative Mapping using XPS

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[Analysis Case] Wide-area Quantitative Mapping using XPS

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It is possible to evaluate the composition distribution in an area of up to 70×70mm.

This is an example of wide-area quantitative mapping using XPS. We evaluated organic residue on silicon wafers using the following procedure. To graph the amount (atomic concentration) rather than peak intensity, it is less affected by sample roughness and allows for data acquisition over a wide area. It is suitable for investigating organic and inorganic contamination, discoloration, surface treatments, etc., as it enables an overview assessment of the compositional distribution on the sample surface.

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Measurement Method: XPS Product Field: Electronic Components, Manufacturing Equipment, Parts, Daily Necessities Analysis Purpose: Composition Distribution Evaluation

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Analysis of electronic components, manufacturing equipment, parts, and daily necessities.

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[Analysis Case] Wide-area Quantitative Mapping by XPS_C0600

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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