[Analysis Case] Structural Analysis of Silicon Dioxide
Structural analysis of amorphous silicon dioxide (SiO2) using Raman scattering spectroscopy.
Silicon dioxide (SiO2) is widely used in semiconductors as an insulating film, in FPD substrate materials, optical materials, and from medical devices to jewelry; however, conducting structural analysis on glass, which is amorphous, is very challenging. Focusing on the cyclic bonding of SiO2 in glass, Raman measurements were conducted. (Figure 1) In single crystal quartz, the spectrum in the glass state is significantly different, and phonon bands due to long-range order are observed. (Figures 2, 3)
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Applications/Examples of results
Analysis of LSI, memory, and display.
