[Analysis Case] Depth Direction Analysis of TFT Wiring Intersection Using SSDP-SIMS
Analysis using SSDP is also possible for microdomains and glass substrates.
An example is shown where secondary ion mass spectrometry (SIMS) was used to analyze the intersection (4μm×10μm) of the data signal wiring and gate electrode wiring of a commercially available TFT LCD from the substrate side (SSDP-SIMS). By measuring from the substrate side (SSDP-SIMS), it becomes possible to provide data free from the influence of high-concentration layers or metal films on the surface side.
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Applications/Examples of results
This is an analysis of the display.