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[SRA] Spread Resistance Measurement Method

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[SRA] Spread Resistance Measurement Method

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A0031.jpg 打ち合わせ.jpg セミナー.jpg

SRA：Spreading Resistance Analysis

SRA is a method that involves diagonally polishing the measurement sample, making contact with two probes on the polished surface, and measuring the spreading resistance. It is also referred to as SRP (Spreading Resistance Profiling). - It is possible to determine the conductivity type (p-type/n-type). - It allows for the evaluation of carrier concentration distribution in the depth direction. - It can analyze a wide range of carrier concentrations from approximately 1E12 to 2E20 /cm3. - It is capable of measuring patterned samples larger than approximately 20μm × 100μm. - By combining SRA with SIMS for evaluation, it is possible to assess the activation rate.

MST HP

basic information

Contact the two probes to the diagonally polished sample surface and measure the electrical resistance directly below. By comparing the measured values with those of calibration standard samples, the measured spreading resistance is converted to resistivity (Ω·cm). Furthermore, using Thurber's curve, which shows the relationship between resistivity and carrier concentration, the carrier concentration (/cm³) is calculated. Note that there is the following relationship between carrier concentration and resistivity.

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Applications/Examples of results

- Evaluation of activation rate after heat treatment of ion-implanted samples - Evaluation of diffusion layer and epitaxial layer in MOS devices - Evaluation of auto-doping in the epitaxial layer - Evaluation of carrier concentration distribution in IGBT and FWD

Detailed information

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