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[Analysis Case] Evaluation of Cu Surface Discoloration Using AES and SEM-EDX

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[Analysis Case] Evaluation of Cu Surface Discoloration Using AES and SEM-EDX

It is possible to perform elemental analysis with a shallow detection depth while conducting SEM observation.

SEM-EDX analysis and AES analysis are suitable for simple investigations of discoloration and foreign substances on metal surfaces. However, when the discoloration or foreign substances are thin or small, AES analysis, which provides information from very shallow areas of the surface (about 4-5 nm), is effective. The AES equipment owned by MST can acquire SEM images, allowing AES analysis to be conducted while confirming the areas of interest using SEM images. In this case study, we will present data comparing the evaluation of discoloration on the Cu surface using AES analysis and SEM-EDX analysis. Additionally, we will also present the results of AES depth direction analysis.

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Analysis of LSI, memory, electronic components, manufacturing equipment, and parts.

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[Analysis Case] Evaluation of Cu Surface Discoloration Using AES and SEM-EDX_C0451

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