X-ray diffraction method

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XRD is a method for obtaining information about the crystal structure of a sample from its diffraction pattern.

- Identification of crystalline substances is possible - Evaluation of crystal size (from a few nm to 100 nm) is possible - Evaluation of crystallinity is possible - Evaluation of orientation is possible - Evaluation of strain and stress is possible - Non-destructive analysis is possible Features of the equipment - Heating analysis is possible from room temperature to 1100°C - Micro-area measurement with a beam diameter of up to 100 μm is possible - Atmosphere control is possible with N2, He, Ar, and vacuum

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The "crystal" that is the subject of evaluation in XRD refers to a state in which the group of atoms, molecules, or ions that make up a substance is arranged in a three-dimensional repeating pattern. When X-rays are irradiated onto the crystal, they are scattered by the electrons within the crystal (scattered X-rays). The scattered X-rays interfere with each other, and strong diffracted X-rays are produced when the conditions of Bragg's law are satisfied. If we denote the interplanar spacing as d and the angle of incidence of the X-rays as θ, the path difference between the first and second planes is given by 2d sinθ. When the path difference is an integer multiple of the wavelength λ of the incident X-rays, the scattered X-rays reinforce each other, and Bragg's law holds true.

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Applications/Examples of results

- Evaluation of crystallinity and orientation of poly-Si, metal films, and organic films - Measurement of crystallite size of poly-Si and metal films - Crystal structure analysis of high-k films, nickel silicide (NiSi), and titanium silicide (TiSi) - Degradation evaluation of lithium-ion secondary battery electrode materials