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White light interferometry

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White light interferometry

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Non-contact and non-destructive 3D measurement is possible.

The white light interferometry measurement method is a device that enables non-contact (non-destructive) three-dimensional measurement of sample surfaces with "wide field of view, high vertical resolution, and wide dynamic range" using a high-brightness white light source. - Surface shape measurement device using a high-brightness white light source - Capable of three-dimensional measurement in a non-contact and non-destructive manner - Wide field of view (50μm×70μm to 5mm×7mm) - High vertical resolution (0.1nm) - Wide dynamic range (<150μm)

Related Link - https://www.mst.or.jp/method/tabid/164/Default.asp…

basic information

A scanning white light interferometer is a method that uses a high-brightness white light source to perform non-contact (non-destructive) three-dimensional measurements of the sample surface with "wide field of view, high vertical resolution, and wide dynamic range."

Price information

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Applications/Examples of results

- Semiconductors, etc. Roughness of polished surfaces of wafers, etc. and surface of deposited films Observation of defects and abnormalities Observation of processed shapes (patterns, holes, trenches, bevels, MEMS) - Metals Surface shapes of ball bearings and bonding (solder) Scratches on gears, cutters, steel plates, fracture surfaces, and shapes of molds Roughness of plated surfaces and observation of friction surfaces - Other materials Observation of cutting surfaces Shape observation of glass, optical components, and electrical components

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