テルモセラ・ジャパン 本社 Official site

  • PRODUCT

◆ANNEAL◆ Wafer Annealing Equipment

テルモセラ・ジャパン

テルモセラ・ジャパン 本社

Max 1000℃, MFC up to 3 systems, APC pressure control, compatible with substrates from 4" to a maximum of 6", high vacuum annealing device (<5 × 10-7 mbar) [ANNEAL] is a research and development annealing device capable of high-temperature heat treatment of substrates such as wafers in a stable process atmosphere. It allows high-temperature processing up to 1000℃ using a heating stage installed in a high vacuum water-cooled SUS chamber. A heat shield is installed inside the chamber to ensure safety through interlock. The mass flow controller can be expanded to a maximum of 3 systems, enabling firing operations at precisely adjusted process gas pressures (APC automatic process control system option). Additionally, there are many options available, including a front view port, dry scroll pump, special substrate holder, and additional thermocouples. The heating stage inside the chamber has three variations depending on the process gas atmosphere and treatment temperature: - Halogen lamp heater: Max 500℃ - C/C composite heater: Max 1000℃ (in vacuum, inert gas only) - SiC coating heater: Max 1000℃ (vacuum, inert gas, O2)

Product image of ANNEAL wafer annealing equipment.

Related Documents

Related Links

Thermocera Japan ANNEAL Page
Developed and manufactured by Moorfield Nanotechnology Ltd (UK) http://moorfield.co.uk/anneal/
ANNEAL Wafer Annealing Equipment Max 1000℃
Φ4inch to Φ6inch substrates High precision APC automatic pressure control Introduction of inert gas and reactive gas (MFC x up to 3 systems) High uniformity, fast heating, high vacuum (<5 × 10-7 mbar) dedicated wafer annealing machine

Related catalog

Thin Film Experiment Device - "PRODUCTS GUIDE 2024"

PRODUCT

Experimental Furnace/Heater "PRODUCTS GUIDE 2024"

PRODUCT

◆ANNEAL◆ Wafer Annealing Equipment

PRODUCT
超高温小型実験炉の表紙画像です

【Mini-BENCH】Ultra-high temperature tabletop experimental furnace Max 2000℃

PRODUCT

Mini-BENCH-prism Semi-Automatic Ultra-High Temperature Experimental Furnace Max 2000℃

PRODUCT

【TCF-C500】Ultra-high temperature small experimental furnace Max 2900℃

PRODUCT

MiniLab-WCF Ultra High Temperature Wafer Annealing Furnace Max 2000℃

PRODUCT

Products Guide: "Ultra-High Temperature Experimental Furnace Product Guide"

CATALOG

【Nanofurnace】Model. BWS-NANO Thermal CVD Device

PRODUCT

[nanoCVD-8G/8N] Graphene/CNT synthesis device

PRODUCT

BH Series [High-Temperature Thin Film Experiment Substrate Heating Heater] Max 1800℃

PRODUCT
基板加熱ヒーター(BN, Inc)の表紙画像です

[SH High-Temperature Substrate Heating Heater] (Inc/BN Plate Max 1100℃) High-Temperature Plate Heater for PVD CVD Vacuum Thin Film

PRODUCT

Hot Stage [Substrate Heating Mechanism] Ultra-High Temperature Substrate Heating Heater

PRODUCT

★nano BenchTop Series Thin Film Experiment Device★

CATALOG

Magnetron Sputtering Cathode

PRODUCT

[nanoPVD-S10A] RF/DC Magnetron Sputtering Device

PRODUCT

◆nanoPVD-T15A◆ High-performance organic and metal film deposition device

PRODUCT

MiniLab Series Flexible Thin Film Experimental Device

PRODUCT

MiniLab-026 Flexible Thin Film Experimental Device

PRODUCT

★【MiniLab-060】Flexible Thin Film Experimental Device★

PRODUCT

★【MiniLab-080】Flexible Thin Film Experimental Device★

PRODUCT

★【MiniLab-090】Flexible Thin Film Experimental Device★

PRODUCT

MiniLab-026/090 Glove Box Thin Film Experiment Device

PRODUCT

PyroMini USB - USB-connected small infrared temperature sensor

PRODUCT

【PyroUSB】USB-connected high-precision infrared temperature sensor

PRODUCT

PyroCouple Infrared Temperature Sensor

PRODUCT

PyroMini Compact High-Performance Infrared Temperature Sensor

PRODUCT