BH Series [High-Temperature Thin Film Experiment Substrate Heating Heater] Max 1800℃
This is a heater for thin film experiments such as PVD and CVD, featuring excellent uniformity, heating characteristics, and controllability. RF/DC bias specifications are also available.
High vacuum compatible with a variety of heater material options. Applicable for various vacuum thin film experiments such as PVD (sputtering, evaporation, EB, etc.), CVD, high-temperature vacuum annealing, and high-temperature sample analysis substrate stages. Custom-made solutions are available to meet various specifications. 【Features】 ● Semi-custom product. Designed and manufactured according to your requirements. ● Easy replacement of spare heater wires. ● Easy installation and maintenance (M6 stud bolts, supports). ● Compatible with RF/DC bias and substrate rotation. 【Standard Accessories】 ● Thermocouple: wire type with alumina insulating sleeve. ● Mounting stud bolts. 【Options】 ● RF (150W)/DC (1KW) bias application. ● Non-standard heater wires (Nb, Mo, Pt/Re, WRe, etc.). ● Substrate holding clips. ● Mounting brackets. ● Substrate holders. ● Tapped holes for holder installation. ● Change of top plate material (PBN, quartz, carbon, Inconel, etc.). ● Additional thermocouples for overheating protection. ● Base flange, vacuum feedthrough.
basic information
【Supported Substrate Size】 ◉ Φ1inch to Φ6inch 【Thermocouple】 ◉ Type K or Type C 【Heater Wire Material】 ◉ Max 1800℃: Graphite, C/C composite wire (in vacuum, Ar, N2) ◉ Max 1500℃: SiC coated wire (in vacuum, Ar, N2, O2) ◉ Max 1600℃: Tungsten wire (in vacuum, Ar, N2, He, H2) ◉ Max 1400℃: Tantalum wire (in vacuum, Ar, N2, He, H2) ◉ Max 900℃: Kanthal wire (in vacuum, Ar, N2, He, O2, H2) ◉ Max 900℃: NiCr wire (in vacuum, Ar, N2, He, H2, O2, atmosphere)
Price information
For more details, please contact our company.
Price range
P3
Delivery Time
OTHER
Delivery dates may vary depending on specifications; please contact us for more information.
Model number/Brand name
BHS series
Applications/Examples of results
PVD (sputtering, ALD, PLD, etc.) CVD substrate heating heaters, sample heating stages for analytical instruments, high-temperature substrate heating stages and holders, etc.
Detailed information
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【Endless possibility_thermal engineering...】 Our company sells vacuum thin film devices for semiconductor and electronic device fundamental research, ultra-high temperature heaters for CVD substrate heating, experimental furnaces, temperature measurement equipment, and more. To meet the endless demand for "heat," which is indispensable in any era, and to respond to various requests in the field of fundamental technology development, we aim to introduce the latest equipment and contribute to research and development in Japan.