MiniLab-026/090 Glove Box Thin Film Experiment Device
Compact and space-saving! Ideal for organic thin film development, all processes such as deposition, sputtering, and annealing can be seamlessly performed within the glove box.
In the film formation process of 2D materials such as OLED (Organic EL), OPV (Organic Photovoltaic), OTFT (Organic Thin Film Transistor), graphene, and TMD (Transition Metal Dichalcogenides), it is necessary to handle samples in an inert gas atmosphere isolated from oxygen and moisture. The MiniLab-026/090-GB achieves a "oxygen and moisture-free" experimental environment for organic film applications by housing the PVD chamber within the GB, creating a compact and space-saving environment. 【Features】 ◉ A series of processes such as PVD film formation, spin coating, and hot plate baking can be performed seamlessly within the GB without exposing them to the outside air. ◉ Space-saving: The chamber does not protrude from the back, so it does not take up space. 【MiniLab Models】 ◉ MiniLab-026 (26ℓ volume): Metal/insulator/organic material deposition, sputtering, plasma etching, annealing ◉ MiniLab-090 (90ℓ volume): Metal/insulator/organic material deposition, EB deposition, sputtering, plasma etching, annealing * Please first contact us with your required specifications, and we will configure the system according to your needs.
basic information
【GB Compatible MiniLab-026/090 Main Specifications】 ◉ Substrate Size: Maximum Φ6" (026), Maximum Φ10" (090) ◉ Chamber: Made of SUS304, UHV compatible (*090 features a sliding door type, with a maintenance door at the back) ◉ 19-inch control rack stored under the workbench ◉ ML Chamber Internal Film Deposition Module: - Resistance heating evaporation source (up to 4 sources) - Organic evaporation source (up to 4 sources) - Φ2" Magnetron cathodes (up to 3 units) - Plasma etching - Substrate heating stage, etc. ◉ High precision film thickness control ◉ Turbo molecular pump + rotary pump (dry scroll pump option) ◉ Other abundant options *For other detailed specifications, please contact us.
Price range
Delivery Time
Model number/Brand name
MiniLab-026/090-GB
Applications/Examples of results
OLED (Organic Electroluminescent) OPV (Organic Photovoltaic) OTFT (Organic Thin-Film Transistor) Graphene 2D Materials (Two-dimensional layered inorganic nanomaterials such as transition metal dichalcogenides) Others
Detailed information
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TE1 (1-pole) to TE4 (4-pole) resistance heating filament *The photo shows a 3-pole type. It is a base chamber equipped with multiple spare ports, allowing for easy rearrangement and expansion.
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Basket type thermal source for MiniLab-LT26A resistance heating evaporation device, basket type x4 pole type.
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Organic material evaporation source cell LTES-1cc or 5cc Organic source cell for MiniLab series Easy to attach and detach the crucible during material replenishment Alumina or quartz crucible Temperature control range 80 to 600°C UHV compatible High-precision PID automatic film thickness loop control is possible with dedicated controllers LTEC-1S (1ch), LTEC-4S (4ch) (±0.1Å/sec)
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LT26A_Glovebox-system-installed-1 LT26A_Glovebox-system-installed-1
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LT26A_Glovebox-system-installed-2 LT26A_Glovebox-system-installed-2
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【Endless possibility_thermal engineering...】 Our company sells vacuum thin film devices for semiconductor and electronic device fundamental research, ultra-high temperature heaters for CVD substrate heating, experimental furnaces, temperature measurement equipment, and more. To meet the endless demand for "heat," which is indispensable in any era, and to respond to various requests in the field of fundamental technology development, we aim to introduce the latest equipment and contribute to research and development in Japan.